SemiconductorWe are a well-established global player and solutions provider of advanced technologies in the semiconductor industry. Through long-term partnerships with the market leaders in machine building and with influential entities such as SEMI, we have acquired the necessary knowledge and know-how to become a leading player for equipping these machines with products that include sensors, PLCs and servo-drives and safety components.
Wet Process
In wet processes, such as single wafer cleaning, butch cleaning and post-CMP cleaning, wafers are cleaned with water or chemicals to remove light contamination, particles and dust. Efficient medium consumption and high throughput is required in wet processes.
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We offer reliable sensing solutions for efficiently and safe medium handling. Incorrect handling causes not only long down times, but also the hazard of electrical shock or exposing operators to dangerous chemicals, so risks have to be found and eliminated quickly. To be as flexible as possible with the various system options, we propose software-module-based machine control with PLC. It enables object-oriented and recyclable software development.
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